The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2007
Filed:
Jun. 23, 2004
Robert Drury, Santa Clara, CA (US);
Peter J. Hopper, San Jose, CA (US);
Michael Mian, Livermore, CA (US);
Peter Johnson, Sunnyvale, CA (US);
Robert Drury, Santa Clara, CA (US);
Peter J. Hopper, San Jose, CA (US);
Michael Mian, Livermore, CA (US);
Peter Johnson, Sunnyvale, CA (US);
National Semiconductor Corporation, Santa Clara, CA (US);
Abstract
An inductor-based integrated MEMS microphone and a method of making the microphone is provided. The microphone structure includes a vibrating inductor that is suspended over another stationary inductor such that the magnetic field induced from one inductor induces an electrical potential across the other. The stationary inductor is embedded in a dielectric material that is etched out over the stationary inductor to provide the cavity over which the vibrating inductor is suspended.