The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 03, 2007

Filed:

May. 30, 2003
Applicants:

Yasuhiro Gotoh, Kadoma, JP;

Seiji Nishiwaki, Kobe, JP;

Yoshiaki Komma, Hirakata, JP;

Inventors:

Yasuhiro Gotoh, Kadoma, JP;

Seiji Nishiwaki, Kobe, JP;

Yoshiaki Komma, Hirakata, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01);
U.S. Cl.
CPC ...
Abstract

In an foreign body detection apparatus, an optical signal detection unit irradiates a light spot onto a surface of an object to be inspected while scanning the surface by employing the light spot in a predetermined direction, and receives a reflected beam from the surface of the inspected object to generate a photodetection signal corresponding to the light intensity of the reflected beam. A foreign body detection unit generates a foreign body detection signal appearing with respect to a leader and a trailer in the scanning direction of a foreign body adhering to the inspected object from the photodetection signal. The foreign body detection signal is obtained, for example, as a difference signal between the photodetection signal and a delayed photodetection signal with a predetermined delay time. A foreign body discrimination unit generates a foreign body discriminating signal indicating a region in which the foreign body is present from the foreign body detection signal.


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