The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2007
Filed:
Jun. 20, 2003
Micro-electro-mechanical actuator for positioning a device such as a read/write head in a disk drive
Ubaldo Mastromatteo, Bareggio, IT;
Bruno Murari, Monza, IT;
Paolo Ferrari, Gallarate, IT;
Simone Sassolini, Sansepolcro, IT;
Ubaldo Mastromatteo, Bareggio, IT;
Bruno Murari, Monza, IT;
Paolo Ferrari, Gallarate, IT;
Simone Sassolini, Sansepolcro, IT;
STMicroelectronics S.r.l., , IT;
Abstract
A micro-electro-mechanical device formed by a body of semiconductor material having a thickness and defining a mobile part and a fixed part. The mobile part is formed by a mobile platform, supporting arms extending from the mobile platform to the fixed part, and by mobile electrodes fixed to the mobile platform. The fixed part has fixed electrodes facing the mobile electrodes, a first biasing region fixed to the fixed electrodes, a second biasing region fixed to the supporting arms, and an insulation region of insulating material extending through the entire thickness of the body. The insulation region insulates electrically at least one between the first and the second biasing regions from the rest of the fixed part.