The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2007
Filed:
Apr. 02, 2005
Applicants:
Ronald A. Synowicki, Lincoln, NE (US);
Craig M. Herzinger, Lincoln, NE (US);
Inventors:
Ronald A. Synowicki, Lincoln, NE (US);
Craig M. Herzinger, Lincoln, NE (US);
Assignee:
J.A. Woollam Co., Inc., Lincoln, NE (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/41 (2006.01); G01J 4/00 (2006.01); G01B 11/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
Spectroscopic ellipsometer system(s) mediated methodology for quantifying layer defining parameters in mathematical models of samples which contain a plurality of layers of different materials, at least some of which are absorbing of electromagentic radiation, wherein an acquired data set is not sufficient to allow definite one for one parameter evaluation, and wherein a global fit procedure can be applied to obtain good parameter starting values for use in a parameter evaluating regression procedure.