The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2007
Filed:
Jun. 22, 2004
Robert W. Horst, San Jose, CA (US);
Robert W. Horst, San Jose, CA (US);
Tibion Corporation, Moffett Field, CA (US);
Abstract
A high-power electrostatic actuator comprising rotor and stator layers with fault-tolerant electrode structures, a housing to contain the electrodes and dielectric fluid, and electronic circuitry driving a plurality of high-voltage phases. The actuator is constructed from multiple rotor and stator films separated by spacing elements. The electrode structure provides self-alignment for precise assembly. The actuator assembly includes built-in fine-position sensors to allow optimal timing in powering phases, and a coarse position sensor for feedback control. The electrode structure has a large region of linear force to provide low torque-ripple allowing simple high/low voltage pulsing instead of analog high voltage waveforms. Single or double sided flexible circuit manufacturing techniques are used to fabricate the rotor and stator films at low cost.