The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2007
Filed:
Oct. 06, 2004
Applicant:
Bhushan L. Sopori, Denver, CO (US);
Inventor:
Bhushan L. Sopori, Denver, CO (US);
Assignee:
Midwest Research Institute, Kansas City, MO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/38 (2006.01); B23K 26/12 (2006.01); H01L 21/00 (2006.01); G01N 21/47 (2006.01);
U.S. Cl.
CPC ...
Abstract
An exemplary system includes a measuring device to acquire non-contact thickness measurements of a wafer and a laser beam to cut the wafer at a rate based at least in part on one or more thicknesses measurements. An exemplary method includes illuminating a substrate with radiation, measuring at least some radiation reflected from the substrate, determining one or more cutting parameters based at least in part on the measured radiation and cutting the substrate using the one or more cutting parameters. Various other exemplary methods, devices, systems, etc., are also disclosed.