The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2007
Filed:
May. 17, 2005
Uma Krishnamoorthy, Albuquerque, NM (US);
Daesung Lee, Stanford, CA (US);
Olav Solgaard, Stanford, CA (US);
Kyoungsik Yu, Seoul, KR;
Uma Krishnamoorthy, Albuquerque, NM (US);
Daesung Lee, Stanford, CA (US);
Olav Solgaard, Stanford, CA (US);
Kyoungsik Yu, Seoul, KR;
The Board of Trustees of the Leland Stanford Junior University, Palo Alto, CA (US);
Abstract
A method for fabricating an optical device and micromechanical device, wherein both devices are monolithically-integrated with a substrate. The optical surfaces and micromechanical devices are each formed in an etch step that is well-suited for forming that device. In addition, the embodiments of the present invention enable the optical surface and micromechanical device to be fabricated irrespective of severe topography on the surface of the substrate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile