The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 03, 2007

Filed:

Dec. 13, 2004
Applicants:

Stephen J. Fonash, University Park, PA (US);

Yinghui Shan, State College, PA (US);

Chih-yi Peng, State College, PA (US);

Ali Kaan Kalkan, State College, PA (US);

Joseph D. Cuiffi, Fort Myers, FL (US);

Daniel Hayes, State College, PA (US);

Paul Butterfoss, State College, PA (US);

Wook Jun Nam, University Park, PA (US);

Inventors:

Stephen J. Fonash, University Park, PA (US);

Yinghui Shan, State College, PA (US);

Chih-Yi Peng, State College, PA (US);

Ali Kaan Kalkan, State College, PA (US);

Joseph D. Cuiffi, Fort Myers, FL (US);

Daniel Hayes, State College, PA (US);

Paul Butterfoss, State College, PA (US);

Wook Jun Nam, University Park, PA (US);

Assignee:

The Penn State Research Foundation, University Park, PA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/36 (2006.01); H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
Abstract

This invention presents a novel method to form uniform or heterogeneous, straight or curved and size-controllable nanostructures including, for example, nanotubes, nanowires, nanoribbons, and nanotapes, including SiNW, using a nanochannel template. In the case of semiconductor nanowires, doping can be included during growth. Electrode contacts are present as needed and may be built in to the template structure. Thus completed devices such as diodes, transistors, solar cells, sensors, and transducers are fabricated, contacted, and arrayed as nanowire or nanotape fabrication is completed. Optionally, the template is not removed and may become part of the structure. Nanodevices such as nanotweezers, nanocantilevers, and nanobridges are formed utilizing the processes of the invention.


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