The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2007
Filed:
Sep. 21, 2004
Bruce Allan Cook, Ankeny, IA (US);
Yun Tian, Ames, IA (US);
Joel Lee Harringa, Ames, IA (US);
Alan Paul Constant, Ames, IA (US);
Alan Mark Russell, Ames, IA (US);
Palaniappa A. Molian, Ames, IA (US);
Bruce Allan Cook, Ankeny, IA (US);
Yun Tian, Ames, IA (US);
Joel Lee Harringa, Ames, IA (US);
Alan Paul Constant, Ames, IA (US);
Alan Mark Russell, Ames, IA (US);
Palaniappa A. Molian, Ames, IA (US);
Iowa State University Research Foundation, Inc., Ames, IA (US);
Abstract
Performance and reliability of microelectromechanical system (MEMS) components enhanced dramatically through the incorporation of protective thin film coatings. Current-generation MEMS devices prepared by the LIGA technique employ transition metals such as Ni, Cu, Fe, or alloys thereof, and hence lack stability in oxidizing, corrosive, and/or high temperature environments. Fabrication of a superhard, self-lubricating coating based on a ternary boride compound AlMgBis described in this letter as a potential breakthrough in protective coating technology for LIGA microdevices. Nanoindentation tests show that hardness of AlMgBfilms prepared by pulsed laser deposition ranges from 45 GPa to 51 GPa, when deposited at room temperature and 573 K, respectively. Extremely low friction coefficients of 0.04-0.05, which are thought to result from a self-lubricating effect, have also been confirmed by nanoscratch tests on the AlMgBfilms. Transmission electron microscopy studies show that the as-deposited films are amorphous, regardless of substrate temperature; however, analysis of FTIR spectra suggests that the higher substrate temperature facilitates formation of the Bicosahedral framework, therefore leading to the higher hardness.