The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2007
Filed:
May. 23, 2002
Bulent M. Basol, Manhattan Beach, CA (US);
Cyprian E. Uzoh, Milpitas, CA (US);
Jeffrey A. Bogart, Los Gatos, CA (US);
Bulent M. Basol, Manhattan Beach, CA (US);
Cyprian E. Uzoh, Milpitas, CA (US);
Jeffrey A. Bogart, Los Gatos, CA (US);
Novellus Systems, Inc., Phoenix, AZ (US);
Abstract
The present invention relates to semiconductor integrated circuit technology and discloses an electrochemical mechanical processing system for uniformly distributing an applied force to a workpiece surface. The system includes a workpiece carrier for positioning or holding the workpiece surface and a workpiece-surface-influencing-device (WSID). The WSID is used to uniformly distribute the applied force to the workpiece surface and includes various layers that are used to process and apply a uniform and global force to the workpiece surface.