The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2007
Filed:
Oct. 18, 2002
Duli Yu, Sugar Land, TX (US);
Arjun Selvakumar, Bellaire, TX (US);
Howard Goldberg, Sugar Land, TX (US);
Taechung Yi, Houston, TX (US);
Duli Yu, Sugar Land, TX (US);
Arjun Selvakumar, Bellaire, TX (US);
Howard Goldberg, Sugar Land, TX (US);
Taechung Yi, Houston, TX (US);
Input/Output, Inc., Houston, TX (US);
Abstract
The present invention provides a digital optical switch apparatus and process for manufacturing the apparatus. The apparatus includes a mirror assembly coupled to a top cap and to a bottom cap. The top and bottom caps each include one or more electrodes that, when energized with electrical energy, move a mirrored surface to one of a plurality of discrete positions. Mirror assemblies can be cascaded to create a packaged assembly having any multiple of discrete positions. The process includes planar micro-machining techniques to create isolated islands for electrical feed through. The process enables mechanical bonding of multiple tiers via a single bond region and through a bond-pad window.