The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2007
Filed:
Mar. 24, 2005
Takashi Nakamura, Tokyo, JP;
Hirohisa Ota, Kawagoe, JP;
Eigo Kawakami, Utsunomiya, JP;
Kazuyuki Kasumi, Utsunomiya, JP;
Toshinobu Tokita, Utsunomiya, JP;
Takashi Nakamura, Tokyo, JP;
Hirohisa Ota, Kawagoe, JP;
Eigo Kawakami, Utsunomiya, JP;
Kazuyuki Kasumi, Utsunomiya, JP;
Toshinobu Tokita, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An exposure apparatus for scanning an exposure spot in an exposure allocated area and for exposing a desired pattern by controlling power of the exposure spot in accordance with an exposure pattern, includes an exposure unit for arranging plural fine exposure elements, for forming plural exposure spots Fto Fon an object to be exposed, and for previously defining the exposure allocated areas SAto SArespectively corresponding to the plural exposure spots Fto F, an exposure allocated area adjuster for adjusting the exposure allocated areas SAand SAin accordance with directions and sizes of offsets (offset amount vectors Vand V) of the exposure spots Fand Ffrom a reference position, and an exposure spot controller for controlling the power of the exposure spot in accordance with the exposure pattern corresponding to actual positions of the exposure spots Fto F