The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2007
Filed:
Jan. 31, 2005
Ronald A. Coutu, Jr., Beavercreek, OH (US);
Paul E. Kladitis, New Carlisle, OH (US);
Robert L. Crane, Kettering, OH (US);
Kevin D. Leedy, Centerville, OH (US);
Ronald A. Coutu, Jr., Beavercreek, OH (US);
Paul E. Kladitis, New Carlisle, OH (US);
Robert L. Crane, Kettering, OH (US);
Kevin D. Leedy, Centerville, OH (US);
United States of America as represented by the Secretary of the Air Force, Washington, DC (US);
Abstract
A method for selecting metal alloys as the electric contact materials for microelectromechanical systems (MEMS) metal contact switches. This method includes a review of alloy experience, consideration of equilibrium binary alloy phase diagrams, obtaining thin film material properties and, based on a suitable model, predicting contact electrical resistance performance. After determination of a candidate alloy material, MEMS switches are conceptualized, fabricated and tested to validate the alloy selection methodology. Minimum average contact resistance values of 1.17 and 1.87 ohms are achieved for micro-switches with gold (Au) and gold-platinum (Au-(6.3 at %)Pt) alloy contacts. In addition, 'hot-switched' life cycle test results of 1.02×10and 2.70×10cycles may be realized for micro-switches with Au and Au-(6.3 at %)Pt contacts. These results indicate increased wear with a small increase in contact resistance for MEMS switches with metal alloy electric contacts.