The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2007
Filed:
Mar. 11, 2003
Iraj Sadighi, Round Rock, TX (US);
Jeff Hudgens, San Francisco, CA (US);
Michael Rice, Pleasanton, CA (US);
Gary Wyka, Austin, TX (US);
Iraj Sadighi, Round Rock, TX (US);
Jeff Hudgens, San Francisco, CA (US);
Michael Rice, Pleasanton, CA (US);
Gary Wyka, Austin, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.