The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2007
Filed:
Oct. 27, 2003
Akira Nakashima, Fukuoka, JP;
Miki Egami, Fukuoka, JP;
Michio Komatsu, Fukuoka, JP;
Yoshihiro Nakata, Kanagawa, JP;
Ei Yano, Kanagawa, JP;
Katsumi Suzuki, Aichi, JP;
Akira Nakashima, Fukuoka, JP;
Miki Egami, Fukuoka, JP;
Michio Komatsu, Fukuoka, JP;
Yoshihiro Nakata, Kanagawa, JP;
Ei Yano, Kanagawa, JP;
Katsumi Suzuki, Aichi, JP;
Catalysts & Chemicals Industries Co., Ltd., Kawassaki-shi, Kanagawa, JP;
Fujitsu Limited, Kawasaki-shi, Kanagawa, JP;
Abstract
The present invention relates to an amorphous silica-based coating film with a low specific dielectric constant of 2.5 or below and the Young's modulus of 6.0 GPa or more and having excellent hydrophobic property, and to a method of forming the same. A liquid composition containing a silicon compound obtained by hydrolyzing tetraalkyl ortho silicate (TAOS) and specific alkoxysilane (AS) in the presence of tetraalkyl ammonium hydroxide (TAAOH) is prepared. The liquid composition is then applied on a substrate, heated and cured to obtain a coating film. The coating film obtained as described has a smooth surface and also has specific micropores therein.