The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 19, 2007

Filed:

Sep. 28, 2004
Applicants:

Thomas P. Brody, Pittsburgh, PA (US);

Paul R. Malmberg, Pittsburgh, PA (US);

Joseph A. Marcanio, Latrobe, PA (US);

Inventors:

Thomas P. Brody, Pittsburgh, PA (US);

Paul R. Malmberg, Pittsburgh, PA (US);

Joseph A. Marcanio, Latrobe, PA (US);

Assignee:

Advantech Global, Ltd., Tortola, VG;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); G01R 31/26 (2006.01);
U.S. Cl.
CPC ...
Abstract

A system and method for active array temperature sensing and cooling. The system includes an active temperature sensing layer, a thermoelectric cooling layer and a heatsink layer. The temperature sensing layer is formed of temperature sensing elements that sense the temperature gradient across an unevenly heated region of the active array substrate. The thermoelectric cooling layer controls the temperature gradient sensed by the temperature sensing layer. The heatsink layer includes a plurality of cooling channels for absorbing thermal energy from the unevenly heated region. The system is under the control of a process control computer.


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