The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2007
Filed:
May. 04, 2004
Neal J. Brock, Tucson, AZ (US);
James E. Millerd, Tucson, AZ (US);
James C. Wyant, Tucson, AZ (US);
John B. Hayes, Tucson, AZ (US);
Neal J. Brock, Tucson, AZ (US);
James E. Millerd, Tucson, AZ (US);
James C. Wyant, Tucson, AZ (US);
John B. Hayes, Tucson, AZ (US);
4D Technology Corporation, Tucson, AZ (US);
Abstract
A phase-difference sensor measures the spatially resolved difference in phase between orthogonally polarized reference and test wavefronts. The sensor is constructed as a pixelated phase-mask aligned to and imaged on a pixelated detector array. Each adjacent pixel of the phase-mask measures a predetermined relative phase shift between the orthogonally polarized reference and test beams. Thus, multiple phase-shifted interferograms can be synthesized at the same time by combining pixels with identical phase-shifts. The multiple phase-shifted interferograms can be combined to calculate standard parameters such as modulation index or average phase step. Any configuration of interferometer that produces orthogonally polarized reference and object beams may be combined with the phase-difference sensor of the invention to provide, single-shot, simultaneous phase-shifting measurements.