The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2007
Filed:
Nov. 12, 2004
Michael R. Rice, Pleasanton, CA (US);
Eric A. Englhardt, Palo Alto, CA (US);
Robert B. Lowrance, Los Gatos, CA (US);
Martin R. Elliott, Round Rock, TX (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Kirk Van Katwyk, Tracy, CA (US);
Amitabh Puri, San Jose, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Eric A. Englhardt, Palo Alto, CA (US);
Robert B. Lowrance, Los Gatos, CA (US);
Martin R. Elliott, Round Rock, TX (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Kirk Van Katwyk, Tracy, CA (US);
Amitabh Puri, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A movable portion of a substrate carrier handler is extended into a transport path along which a substrate carrier transport system transports a substrate carrier, respective kinematic coupling events are detected between corresponding interface elements of the movable portion and the substrate carrier, respective signals are generated in response thereto, and an alignment offset between the substrate carrier and the substrate carrier transport system is determined based on the signals. A movable portion matches an elevation, position, and/or a speed/velocity of a substrate carrier moving along the transport path. Sensors for detecting kinematic coupling and generating signals in response thereto are provided on the movable portion. An end effector includes a support with interface elements and sensors for detecting kinematic coupling and generating respective signals. A substrate carrier handler includes a movable portion, interface elements, sensors, and a controller for receiving signals and determining an alignment offset.