The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2007
Filed:
Jul. 16, 2001
Jean-louis Stehle, Colombes, FR;
Jean-philippe Piel, Marly-le-Roi, FR;
Pierre Boher, Yerres, FR;
Luc Tantart, Palaiseau, FR;
Jean-pierre Rey, Fontenay aux Roses, FR;
Jean-Louis Stehle, Colombes, FR;
Jean-Philippe Piel, Marly-le-Roi, FR;
Pierre Boher, Yerres, FR;
Luc Tantart, Palaiseau, FR;
Jean-Pierre Rey, Fontenay aux Roses, FR;
Societe de Production et de Recherches Appliquees, Bois-Colombes, FR;
Abstract
The invention concerns an ellipsometer comprising: a source () capable of emitting a broadband ray (), a polarizer () for producing a polarised incident beam () adapted to illuminate a sample () according to at least a selected angle; an analyzer () providing an output beam () in response to said reflected beam () and at least a reflecting optical element () arranged between the source () and the sample () and/or between the sample () and the sensor, and capable of focusing the incident beam () and/or the reflected beam () according to a selected spot The ellipsometer further comprises at least a first refracting optical element () arranged between the sample () and the sensor and/or between the source () and the sample () to collect and focus said reflected beam and/or said incident beam, thereby enabling to provide at least a refracting element () and a reflecting element () on either side of the sample () and hence to place the source and the sensor on the same side relative to said spot.