The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2007
Filed:
Jul. 16, 2004
Ryohei Kitao, Kanagawa, JP;
Koji Arita, Kanagawa, JP;
Ryohei Kitao, Kanagawa, JP;
Koji Arita, Kanagawa, JP;
NEC Electronics Corporation, Kanagawa, JP;
Abstract
A method of manufacturing a semiconductor device is to be provided, which improves filling performance of a conductive layer to be formed by an electrolytic plating process in an interconnect trench or a via hole, and achieves a higher in-plane uniformity in bottom-up performance. An electrolytic plating process to fill with a conductive layer at least one of an interconnect trench and a via hole formed in a dielectric layer on a semiconductor substrate includes a first step of executing a plating operation under a predetermined integrated current density, which is a product of a current density representing a current value supplied per unit area of a plating solution containing a material which constitutes the conductive layer and a plating time, and a second step of executing a plating operation under a lower current density than that of the first step.