The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2007
Filed:
Jul. 11, 2003
Applicants:
Toshiji Taiji, Kanagawa, JP;
Yasuaki Tsuchiya, Kanagawa, JP;
Tomoyuki Ito, Tokyo, JP;
Kenichi Aoyagi, Tokyo, JP;
Shin Sakurai, Tokyo, JP;
Inventors:
Toshiji Taiji, Kanagawa, JP;
Yasuaki Tsuchiya, Kanagawa, JP;
Tomoyuki Ito, Tokyo, JP;
Kenichi Aoyagi, Tokyo, JP;
Shin Sakurai, Tokyo, JP;
Assignee:
NEC Electronics Corporation, Kanagawa, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C09K 13/00 (2006.01); C09K 13/06 (2006.01); H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates to a slurry for chemical mechanical polishing, which contains a silica polishing material, an oxidizing agent, a benzotriazole-based compound, a diketone and water.