The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2007
Filed:
Nov. 16, 2005
Kazuhiro Miyakawa, Itabashi-ku, JP;
Yoichiro Iwa, Itabashi-ku, JP;
Kazuhiro Miyakawa, Itabashi-ku, JP;
Yoichiro Iwa, Itabashi-ku, JP;
Kabushiki Kaisha Topcon, Tokyo, JP;
Abstract
A surface inspection apparatus () comprises a light () source for emitting a light beam L, an optical illumination system () for projecting the light beam on an inspected surface () formed by a film, an optical detection system () having lenses to spatially split reflection lights and an aperture stop () having apertures disposed with polarization elements () for transilluminating mutually different polarized light components, a light intensity detection device () for individually detecting the light intensities of the respective reflection lights passed through the respective polarization elements, a scanning device (), and an arithmetic processing device () for detecting the polarization conditions of the respective reflection lights and obtaining a film thickness of the film and at least one of the physical properties of the film.