The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2007
Filed:
Apr. 02, 2002
Applicants:
Osamu Kobayashi, Kawasaki, JP;
Akiyoshi Watanabe, Kawasaki, JP;
Inventors:
Osamu Kobayashi, Kawasaki, JP;
Akiyoshi Watanabe, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/108 (2006.01); H01L 29/94 (2006.01);
U.S. Cl.
CPC ...
Abstract
A lower electrode of a capacitor element and a wiring are formed in a wiring layer that is one layer below an uppermost wiring layer. Subsequently, after the formation of a capacitance insulating film, a TiN film is formed on the entire surface thereof, and then the TiN film is patterned, thereby forming an upper electrode of a capacitor element and a lead wiring for electrically connecting the upper electrode to a wiring of a third wiring layer. Furthermore, in the uppermost layer, a shield is formed covering the upper portion of the capacitor element.