The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2007
Filed:
Dec. 26, 2003
Seok Su Kim, Icheon-si, KR;
Seok Su Kim, Icheon-si, KR;
Dongbu Electronics Co., Ltd., Seoul, KR;
Abstract
Methods of fabricating a semiconductor device is disclosed. An illustrated method comprises: providing a substrate including an active region and a non-active region; forming a first gate electrode including a dielectric layer pattern, a first conducting layer pattern, and an insulating layer pattern; growing a thermal oxide layer on the substrate and the first gate electrode; forming a nitride layer over the substrate and the thermal oxide layer; and removing the nitride layer and the thermal oxide layer using an etch back process to form spacers on sidewalls of the first gate electrode. By including the thermal oxide layer, the spacers ensure insulation capability.