The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2007
Filed:
Aug. 11, 2005
Applicant:
Shunji Nakamura, Kawasaki, JP;
Inventor:
Shunji Nakamura, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8242 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor device comprises: a lower contact electrode; an adhesion improving layerformed on the lower contact electrode; and a capacitor including a lower electrodein a projected structure formed on the adhesion improving layer, a capacitor dielectric filmformed on the lower electrode, and an upper electrodeformed on the capacitor dielectric film, in which a gap is formed on a sidewall of the adhesion improving layer. The gap is at least partially left as a cavity. The gap insulates the upper electrodeand the adhesion improving layerby the cavity