The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2007
Filed:
Oct. 05, 2004
Applicants:
Shigeto Kamata, Kanagawa, JP;
Kazuhiro Oki, Chiba, JP;
Akihiro Kimura, Kanagawa, JP;
Kazumasa Takatsu, Tokyo, JP;
Inventors:
Shigeto Kamata, Kanagawa, JP;
Kazuhiro Oki, Chiba, JP;
Akihiro Kimura, Kanagawa, JP;
Kazumasa Takatsu, Tokyo, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 9/00 (2006.01); H01J 9/42 (2006.01);
U.S. Cl.
CPC ...
Abstract
In an electron source manufacturing apparatus, the quantity of heat generated from an electron source substrate is measured. A temperature of a support member for the electron source substrate is controlled based on the measured quantity of heat generated. A variation in performances of electron source substrates is suppressed, which increase their life.