The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2007
Filed:
Aug. 09, 2005
Jae-woo Chung, Seoul, KR;
Jong-hwan Weon, Suwon-si, KR;
Hyo-sang Jung, Seoul, KR;
Myung-kill Kim, Yongin-si, KR;
Tae-ha Jeon, Suwon-si, KR;
Kyung-bo Sim, Seoul, KR;
Jae-Woo Chung, Seoul, KR;
Jong-Hwan Weon, Suwon-si, KR;
Hyo-Sang Jung, Seoul, KR;
Myung-Kill Kim, Yongin-si, KR;
Tae-Ha Jeon, Suwon-si, KR;
Kyung-Bo Sim, Seoul, KR;
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Abstract
A control system for a semiconductor processing apparatus comprises a control server connected to a semiconductor processing apparatus, a verification server connected to the control server, and a database connected to the verification server. The verification server evaluates input parameter values stored in the semiconductor processing apparatus against verification data stored in the database. The results of the evaluation are used to determine whether a process will be performed by the semiconductor processing apparatus.