The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2007
Filed:
Mar. 15, 2005
Applicants:
Junhua Liu, Palatine, IL (US);
Aroon V. Tungare, Winfield, IL (US);
Min-xian M. Zhang, Inverness, IL (US);
Inventors:
Junhua Liu, Palatine, IL (US);
Aroon V. Tungare, Winfield, IL (US);
Min-Xian M. Zhang, Inverness, IL (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
A microelectromechanical systems (MEMS) apparatus () having a footprint of about 1 to 10 millimeters by about 1 to 10 millimeters comprises a movable member () that can be stopped at either of at least two positions by electrically neutral stops (). Depending upon the needs of a given application, these stops may all be fabricated using materials deposition and removal techniques or some, though not all, may comprise an attached component.