The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2007
Filed:
Oct. 21, 2004
Applicants:
Noriaki Soga, Hachioji, JP;
Jun Koshoubu, Hachioji, JP;
Hiroshi Tsukada, Hachioji, JP;
Inventors:
Assignee:
Jasco Corporation, Hachioji-shi, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G01N 21/55 (2006.01);
U.S. Cl.
CPC ...
Abstract
A mapping-measurement apparatus includes a light illumination unit, a photodetector for detecting, through an aperture, reflection light or transmission light from a sample, and adjustable scanning mirrors on the illumination and detection sides of the sample, each mirror having two independent rotational axes about which they can be independently rotated by a controller. The aperture restricts light incident on the photodetector from a predetermined portion of the sample surface.