The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2007
Filed:
Feb. 08, 2005
Applicants:
Junji Hirokane, Nara, JP;
Michinobu Mieda, Shiki-gun, JP;
Go Mori, Nara, JP;
Inventors:
Assignee:
Sharp Kabushiki Kaisha, Osaka, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03C 5/00 (2006.01); G01D 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for forming micropatterns includes forming a thin film consisting of a single layer or of plural layers on a substrate, irradiating an energy beam to the thin film to elevate the temperature of a region to a predetermined temperature or higher to thereby modify the region of the thin film, and patterning the thin film at least in such a manner to leave over the modified region.