The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7223505 B1

PDF
Full Text
Expired
Date of Patent:
May. 29, 2007

Filed:

Feb. 08, 2005
Applicants:

Junji Hirokane, Nara, JP;

Michinobu Mieda, Shiki-gun, JP;

Go Mori, Nara, JP;

Inventors:

Junji Hirokane, Nara, JP;

Michinobu Mieda, Shiki-gun, JP;

Go Mori, Nara, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G03C 5/00 (2006.01); G01D 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for forming micropatterns includes forming a thin film consisting of a single layer or of plural layers on a substrate, irradiating an energy beam to the thin film to elevate the temperature of a region to a predetermined temperature or higher to thereby modify the region of the thin film, and patterning the thin film at least in such a manner to leave over the modified region.


Find Patent Forward Citations

Hirokane, Junji. (2007). Method for forming micropatterns (U.S. Patent No. 7223505). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7223505

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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