The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7221458 B1

PDF
Full Text
Expired
Date of Patent:
May. 22, 2007

Filed:

Jan. 23, 2001
Applicants:

Vladimir A. Andreev, Moscow, RU;

Konstantin V. Indukaev, Moscow, RU;

Pavel A. Osipov, Moscow, RU;

Inventors:

Vladimir A. Andreev, Moscow, RU;

Konstantin V. Indukaev, Moscow, RU;

Pavel A. Osipov, Moscow, RU;

Assignee:

Other;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01B 11/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

Method of optical measuring the microrelief of an object using a modulation interference microscope. An input coherent monochromatic polarized light flux is split into an object light beam exposing the object and a reference beam. The light flux intensity is redistributed between the object and reference beams. Thereafter, polarization modulation is performed separately for the object beam and the reference beam. The polarized object beam is reflected onto the object plane to expose the object field. Amplitude modulation is performed by changing the intensity ratio between the object beam and the reference beam. A fraction of the light at a pixel caused by the object beam with respect to the total light falling on the pixel is determined.


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Andreev, Vladimir. (2007). Method for measuring the microrelief of an object and optical characteristics of near-surface layer, modulation interference microscope for carrying out said method (U.S. Patent No. 7221458). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7221458

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