The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2007
Filed:
Jan. 28, 2004
Mike Binnard, Belmont, CA (US);
Mike Binnard, Belmont, CA (US);
Nikon Corporation, Tokyo, JP;
Abstract
A stage assembly () for moving and positioning a device () includes a stage base (), a stage (), a stage mover assembly (), and a reaction assembly (). The stage mover assembly () moves the stage () relative to the stage base (). The reaction assembly () is coupled to the stage mover assembly (). The reaction assembly () reduces the reaction forces created by the stage mover assembly () that are transferred to the stage base (). In one embodiment, the reaction assembly () includes a pair of masses (A), (B) and a connector assembly () that connects the masses (A), (B) together, allows the masses to move independently along a first axis, and causes the masses (A), (B) to move concurrently along a second axis.