The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2007
Filed:
Nov. 30, 2005
Ertugrul Berkcan, Clifton Park, NY (US);
Shankar Chandrasekaran, Tamil Nadu, IN;
Christopher James Kapusta, Delanson, NY (US);
Laura Jean Meyer, Schenectady, NY (US);
Glenn Scott Claydon, Wynantskill, NY (US);
Debbie Gahaton Jones, Berkeley, CA (US);
Anis Zribi, Rexford, NY (US);
Ertugrul Berkcan, Clifton Park, NY (US);
Shankar Chandrasekaran, Tamil Nadu, IN;
Christopher James Kapusta, Delanson, NY (US);
Laura Jean Meyer, Schenectady, NY (US);
Glenn Scott Claydon, Wynantskill, NY (US);
Debbie Gahaton Jones, Berkeley, CA (US);
Anis Zribi, Rexford, NY (US);
General Electric Company, Niskayuna, NY (US);
Abstract
A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component a structural component comprising a silicon substrate and a compliant layer comprising a material selected from the group consisting of silicon dioxide and silicon nitride, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field, and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.