The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2007
Filed:
Mar. 17, 2003
Takashi Ando, Kawasaki, JP;
Jiro Miura, Kawasaki, JP;
Yukinobu Hikosaka, Kawasaki, JP;
Akio Itoh, Kawasaki, JP;
Junichi Watanabe, Kawasaki, JP;
Kenkichi Suezawa, Kawasaki, JP;
Takashi Ando, Kawasaki, JP;
Jiro Miura, Kawasaki, JP;
Yukinobu Hikosaka, Kawasaki, JP;
Akio Itoh, Kawasaki, JP;
Junichi Watanabe, Kawasaki, JP;
Kenkichi Suezawa, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
There are contained first and second conductive plugs formed in first insulating layer, an island-like oxygen-barrier metal layer for covering the first conductive plug, an oxidation-preventing insulating layer formed on the first insulating layer to cover side surfaces of the oxygen-barrier metal layer, a capacitor having a lower electrode formed on the oxygen-barrier metal layer and the oxidation-preventing insulating layer, a dielectric layer formed on the lower electrode, and an upper electrode formed on the dielectric layer, a second insulating layer for covering the capacitor and the oxidation-preventing insulating layer, a third hole formed in respective layers from the second insulating layer to the oxidation-preventing insulating layer on the second conductive plug, and a third conductive plug formed in the third hole and connected to the second conductive plug.