The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2007
Filed:
Dec. 17, 2004
Applicants:
Lothar Rottmann, Ganderkesee, DE;
Gerhard Jung, Delmenhorst, DE;
Franz-josef Mersch, Sottrum, DE;
Inventors:
Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 49/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates to a method and a device for the measurement of ions by coupling different measurement methods/techniques, a first detector being a collector () and a second detector being an SEM (), and the ions to be measured or resulting secondary particles being selectively delivered to the collector or the SEM. The SEM () is operated selectively in analog mode or count mode. The collector () is provided with an integrator.