The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2007
Filed:
Mar. 24, 2005
Applicant:
Paul Bennett, Bristol, GB;
Inventor:
Paul Bennett, Bristol, GB;
Assignee:
Aviza Technology Limted, Newport, Gwent, GB;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05B 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
This invention relates to RV stand offs or breaks and in particular, but not exclusively not to stand offs which are suitable for use in plasma generating apparatus. A stand offincludes a resistive or insulating cylinder, through which gas feeds are drilled and a close coupled helically wound combination, generally indicated at. This combinationcomprises an RF conductive tubein the form of a braided cable; a thermocouplehaving twisted pair supply cablesand a heater elementin the form of a cable loop or pair.