The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2007
Filed:
Dec. 08, 2005
Isao Suzuki, Tokyo, JP;
Isao Suzuki, Tokyo, JP;
MKS Japan, Inc., Tokyo, JP;
Abstract
According to the present invention, there is provided a high-precision differential pressure sensor which is not affected by a considerable change in baseline pressure. A differential pressure sensor of the present invention includes: a pair of diaphragms, each including a diaphragm portion capable of being deformed due to application of a pressure and a support portion for holding an outer peripheral edge of the diaphragm portion; a pair of fixed electrodes in disk-like form fixed to the support portions of the diaphragms; and a movable electrode including a disk-like electrode portion and shaft-like projections extending in opposite directions from a central portion of the electrode portion. The shaft-like projections extend at a right angle relative to the electrode portion, and the movable electrode is secured to central portions of the diaphragms through the shaft-like projections so that the electrode portion faces each of the fixed electrodes in a predetermined spaced relationship. The movable electrode is capable of moving so as to allow a distance between the electrode portion and each of the fixed electrodes to vary according to a difference between fluid pressures acting on the respective diaphragm portions of the diaphragms. A capacitance generated between the electrode portion and each of the fixed electrode changes due to a variance in the distance between the electrode portion and each of the fixed electrode, and a differential pressure is detected, based on this change in capacitance.