The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2007
Filed:
Jan. 12, 2005
Daniel Paul Beaman, Cedar Park, TX (US);
Robert F. Florence, Jr., Poughkeepsie, NY (US);
Howard Victor Mahaney, Jr., Cedar Park, TX (US);
Frederic William Wright, Iv, Newburgh, NY (US);
Daniel Paul Beaman, Cedar Park, TX (US);
Robert F. Florence, Jr., Poughkeepsie, NY (US);
Howard Victor Mahaney, Jr., Cedar Park, TX (US);
Frederic William Wright, IV, Newburgh, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A system, apparatus and method for controlling temperature of an integrated circuit in a chip tester is disclosed. Embodiments include supplying a chilled fluid to a cold plate at a first flowrate, where the first flowrate is associated with a first valve setting based on at least a desired temperature setpoint and an applied power. Embodiments may determine a change in applied power and modify the chilled fluid flowrate in response to a change in testing conditions to a second flowrate associated with a second valve setting associated with at least the desired temperature setpoint and the changed testing conditions. This feed forward loop may be supplemented by a feedback loop that includes modifying the energy supplied to a cold plate heater in response to a comparison of a current temperature and the temperature setpoint. The valve may be a proportional control valve or the like.