The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2007
Filed:
Dec. 22, 2005
Yoshinori Nakada, Hitachinaka, JP;
Shunsuke Koshihara, Hitachinaka, JP;
Ryuichirou Tamochi, Hitachinaka, JP;
Yayoi Hosoya, Mito, JP;
Hidetoshi Morokuma, Hitachinaka, JP;
Yoshinori Nakada, Hitachinaka, JP;
Shunsuke Koshihara, Hitachinaka, JP;
Ryuichirou Tamochi, Hitachinaka, JP;
Yayoi Hosoya, Mito, JP;
Hidetoshi Morokuma, Hitachinaka, JP;
Hitachi, Ltd., Tokyo, JP;
Hitachi Science Systems, Ltd., Ibaraki, JP;
Abstract
In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.