The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 2007
Filed:
Mar. 03, 2003
Applicants:
George G. Barclay, Jefferson, MA (US);
Subbareddy Kanagasabapathy, Worcester, MA (US);
Matthew A. King, Boston, MA (US);
Inventors:
George G. Barclay, Jefferson, MA (US);
Subbareddy Kanagasabapathy, Worcester, MA (US);
Matthew A. King, Boston, MA (US);
Assignee:
Shipley Company, L.L.C., Marlborough, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
G03C 1/73 (2006.01); G03F 7/039 (2006.01); C07F 7/12 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention includes new Si-containing monomers, polymers containing such monomers and photoresists that contain the polymers. Synthetic methods of the invention include reacting a vinyl carbocyclic aryl ester compound with a reactive silane compound to provide the monomer.