The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2007
Filed:
Apr. 26, 2005
Masaki Hara, Kanagawa, JP;
Kazuhito Hori, Kanagawa, JP;
Hiroto Ido, Chiba, JP;
Naoto Kojima, Kanagawa, JP;
Kazuhiro Hane, Miyagi, JP;
Masaki Hara, Kanagawa, JP;
Kazuhito Hori, Kanagawa, JP;
Hiroto Ido, Chiba, JP;
Naoto Kojima, Kanagawa, JP;
Kazuhiro Hane, Miyagi, JP;
Sony Corporation, Tokyo, JP;
Abstract
The hinge () should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body () to effectively prevent the hinge () from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge () can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge () is formed from a different material, such as SiN, from the mirror substrate material from which the frame () and mirror body () are formed.