The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2007
Filed:
Jul. 21, 2005
Hugh Charles Stevenson, Hughesdale, AU;
Hugh Charles Stevenson, Hughesdale, AU;
Varian Australia Pty Ltd, Mulgrave, Victoria, AU;
Abstract
A RF power generator for exciting inductively coupled plasma for spectrometry includes an induction coil for exciting the plasma as part of its load circuit. The load circuit also comprises a capacitor connected in parallel with the induction coil. The RF power generator is a free running oscillator having a switching circuit of two MOSFETs alternately switchable on and off via a feedback control circuit from the load circuit. RF power from the switching circuit is coupled to the load circuit via an inductor. The inductor and load circuit is resonant at a first frequency, which is lower than the operating frequency of the power generator.