The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2007
Filed:
Jun. 27, 2005
Andrei Brunfeld, Cupertino, CA (US);
Gregory Toker, Jerusalem, IL;
Bryan Clark, Mountain View, CA (US);
Andrei Brunfeld, Cupertino, CA (US);
Gregory Toker, Jerusalem, IL;
Bryan Clark, Mountain View, CA (US);
Xyratex Technology Limited, Havant, Hampshire, GB;
Abstract
A resonator method and system for distinguishing characteristics of surface features or contaminants provides improved inspection or surface feature detection capability in scanning optical systems. A resonator including a surface of interest in the resonant path is coupled to a detector that detects light leaving the resonator. Changes in the resonance peak positions and peak intensities are evaluated against known changes for standard scatters in order to determine the material characteristics of an artifact at the surface of interest that causes a resonance change. The lateral size of the artifact is determined by de-convolving a known illumination spot size with the changing resonance characteristics, and the standard scatterer data is selected in conformity with the determined artifact size. The differential analysis using resonance peak shifts corresponding to phase and amplitude information provides an identification algorithm that identifies at least one artifact/material type is identified from matching known behaviors of artifacts/materials.