The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 08, 2007

Filed:

Sep. 20, 2002
Applicants:

Pierre Legagneux, Le Mesnil St Denis, FR;

Gilles Pirio, Paris, FR;

Didier Pribat, Sevres, FR;

William Ireland Milne, Newmarket, GB;

Kenneth Boh Khin Teo, Cambridge, GB;

Inventors:

Pierre Legagneux, Le Mesnil St Denis, FR;

Gilles Pirio, Paris, FR;

Didier Pribat, Sevres, FR;

William Ireland Milne, Newmarket, GB;

Kenneth Boh Khin Teo, Cambridge, GB;

Assignee:

Thales, Neuilly sur Seine, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention relates to a process for the controlled growth of nanotubes or nanofibers on a substrate, characterized in that it furthermore comprises the production, on the substrate (), of a bi-layer structure composed of a layer of catalyst material (), for catalyzing the growth of nanotubes or nanofibers, and a layer of associated material, said associated material being such that it forms a noncatalytic alloy with the catalyst material at high temperature. The invention also relates to a process for fabricating a field-emission cathode using the above nanotube or nanofiber fabrication process. These processes allow very precise positioning of the catalyst spots from which the nanotubes and nanofibers can be grown and allow the fabrication of cathodes for which the nanotubes or nanofibers are self-aligned with the aperture in the extraction grid. Applications: electron tubes, nanolithography.


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