The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2007
Filed:
Aug. 19, 2004
Applicants:
Tony Thanh Phan, Flower Mound, TX (US);
Daniel Tsai, Plano, TX (US);
Inventors:
Tony Thanh Phan, Flower Mound, TX (US);
Daniel Tsai, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of fabricating a thin film resistor (). The resistor material (), e.g., NiCr, is deposited. A hard mask material (), e.g., TiW, may be deposited over the resistor material (). The resistor material () and hard mask material () are patterned and sputter etched to form the resistor body. For example, a sputter etch chemistry comprising BCl, Cl, and Ar may be used to etch the resistor material.