The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2007
Filed:
Nov. 18, 2004
Low-temperature plasma deposited hydrogenated amorphous germanium carbon abrasion-resistant coatings
James Neil Johnson, Niskayuna, NY (US);
Kevin Warner Flanagan, Albany, NY (US);
George Theodore Dalakos, Niskayuna, NY (US);
James Neil Johnson, Niskayuna, NY (US);
Kevin Warner Flanagan, Albany, NY (US);
George Theodore Dalakos, Niskayuna, NY (US);
Lockheed Martin Corporation, Bethesda, MD (US);
Abstract
A method of forming a hydrogenated amorphous germanium carbon (α-GeC:H) film on a surface of an infrared (IR) transmissive material such as a chalcogenide is provided. The method includes positioning an IR transmissive material in a reactor chamber of a parallel plate plasma reactor and thereafter depositing a hydrogenated amorphous germanium carbon (α-GeC:H) film on a surface of the IR transmissive material. The depositing is performed at a substrate temperature of about 130° C. or less and in the presence of a plasma which is derived from a gas mixture including a source of germanium, an inert gas, and optionally hydrogen. Optical transmissive components, such as IR sensors and windows, that have improved abrasion-resistance are also provided.