The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2007
Filed:
Nov. 25, 2003
Masahiro Tada, Kanagawa, JP;
Takashi Kinoshita, Kanagawa, JP;
Shun Mitarai, Kanagawa, JP;
Yasuyuki Ito, Kanagawa, JP;
Masahiro Tada, Kanagawa, JP;
Takashi Kinoshita, Kanagawa, JP;
Shun Mitarai, Kanagawa, JP;
Yasuyuki Ito, Kanagawa, JP;
Sony Corporation, Tokyo, JP;
Abstract
Disclosed is a micromachine as a high-frequency filter which includes a high Q value and is suitable for higher frequency bands. The micromachine () includes an output electrode () formed on a substrate (), an interlayer insulating film () which covers the substrate () and includes an opening () whose bottom is the output electrode (), and a beltlike resonator electrode () so formed on the interlayer insulating film () as to traverse above the space (A) in the opening (), with the resonator electrode () being concave toward the opening () along the side wall of the opening ().