The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2007
Filed:
Jan. 06, 2003
Applicants:
Osamu Taniguchi, Kawasaki, JP;
Yasuo Yamagishi, Kawasaki, JP;
Koji Omote, Kawasaki, JP;
Inventors:
Assignee:
Fujitsu Limited, Kawasaki, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01);
U.S. Cl.
CPC ...
Abstract
A circuit substrate comprises a glass substrate, through-holesformed through the glass substrateand via electrodesburied in the through-holes. An opening width of the through-holesis minimum inside the glass substrate and is increased toward both surfaces of the glass substrate. Accordingly, the detachment of the via electrodescan be prevented without increasing the surface roughness of the inside walls of the through holes, and stresses generated in the core substrate can be mitigated.