The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7211520 B1

PDF
Full Text
Expired
Date of Patent:
May. 01, 2007

Filed:

Feb. 25, 2005
Applicants:

Ute Zschieschang, Erlangen, DE;

Hagen Klauk, Erlangen, DE;

Marcus Halik, Erlangen, DE;

Guenter Schmid, Hemhofen, DE;

Stefan Braun, Willich, DE;

Inventors:

Ute Zschieschang, Erlangen, DE;

Hagen Klauk, Erlangen, DE;

Marcus Halik, Erlangen, DE;

Guenter Schmid, Hemhofen, DE;

Stefan Braun, Willich, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/461 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for fabricating a field effect transistor, in which, after the etching of the gate electrode, the removal of the etching mask is omitted since the etching mask serves as a gate dielectric. The etching mask or the dielectric has a self-assembled monolayer of an organic compound.


Find Patent Forward Citations

Zschieschang, Ute. (2007). Method for fabricating a field effect transistor (U.S. Patent No. 7211520). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7211520

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…