System and method for detection of spatial signature yield loss

Abstract

A method and system are provided for identifying systematic yield losses. The method comprising testing produced products using a test sequence, the testing sequence producing yield data, the yield data related to a wafer. For each zone of each wafer size calculating and storing a first data series R1, wherein each element of said first series is the yield of a said zone. Further calculating and storing for each element of R1 a second data series R2, wherein each element of the second series is a p consecutive element moving average of R1. Calculating and storing for each element of R1 a third data series R3 wherein each element of the third data series a p consecutive element moving standard deviation of data series R1. Calculating for each element of R1 a trigger point, wherein the trigger point is calculated as the respective R2 element less an adjusted respective R3 value. A notification is triggered when the trigger point calculated for each element of R1 is greater than the respective element of R1.